What is the relationship and difference between IC process, CMOS process and MEMS process? What is the definition of all three, and how are they related?

ic is intergarted circuit, integrated circuit, collectively. So the ic process is the process of manufacturing integrated circuits, there are many kinds of, such as the earliest bipolar process, later nmos process, pmos process, and the current stage of the widely used cmos process (cmos process is in a set of process species can produce two kinds of mos, nmos and pmos), in addition to integrated cmos and bipolar bi-cmos process, and so on.

And mems that microelectromechanical systems, is a new discipline and field, with the ic has a great deal of relevance, of course, mems process and cmos process will have a great deal of similarity, and now the direction of development should be to integrate the two into a set of processes.

The mems process is very similar to the cmos process, and the direction of development should be to integrate the two into a single process.