Please ask why the semiconductor industry equipment with quartz, silicon carbide, graphite these three materials to doparts?+ urgent~~~~

Quartz materials can have a very high purity, semiconductor applications of quartz materials, the total amount of impurities are below 30 parts per million, will not contaminate the semiconductor material being processed. It can be used as diffusion furnace tubes, transfer tools for silicon wafers, cleaning tanks and so on.

Silicon carbide can also have high purity and superior high temperature resistance, can be used as a diffusion furnace tube, such as Saint-Gobain's silicon carbide furnace tube with excellent performance and long service life.

Graphite can have high purity, is a good conductor of electricity and heat, in the isolation of oxygen conditions can be made into excellent resistance heating element, can be used at high temperatures and still maintain high strength.

The specific properties of these materials, you can view the words, or in the manufacturer's introduction to see more specific data and content, here will not be detailed.