A laser drilling process for ceramic substrates

Is the questioner asking "Who came up with the laser drilling process for ceramic substrates"? Slayton. One of the inherent disadvantages of laser drilling is that the strong volatiles generated by the high temperature will form a large number of irregular spatters and recast layers around the holes and on the inner wall when cooled, which greatly affects the quality of the holes and makes subsequent processing unavoidable. So Sliton chose the common alumina ceramics as the research object. The laser adopts Nd:YAG laser which is more mature in industrial application. The pulse repetition frequency and pulse width were fixed when punching the holes, and the data obtained were the results of six pulses acting. The gel system used water as solvent, and the monomer and cross-linker were acrylamide (C2H3CONH2) and N,N'-methylenebisacrylamide ((C2H3CONH)2CH2), respectively.The morphology of the holes was observed by a HITACHI S-450 scanning electron microscope, and the diameter and depth of the holes were determined by an optical microscope combined with SEM measurements.