What are the typical characteristics of piezoresistive sensors?

Typical characteristics of piezoresistive sensors are as follows:

1, the sensitivity coefficient of piezoresistive sensor is 50- 100 times larger than that of metal strain pressure sensor. Sometimes the output of piezoresistive sensor can be measured directly without amplifier.

2. Due to the adoption of integrated circuit technology, the structure is small in size and light in weight.

3, the pressure resolution is high, and micro-pressure as small as blood pressure can be detected.

4. The frequency response is good, and the pulsating pressure of tens of kilohertz can be measured.

5. Because the force sensing element and the detecting element of the sensor are controlled on the same silicon chip, the sensor has reliable operation, high comprehensive precision and long service life.

6. Because the sensor is made of semiconductor material silicon, it is very sensitive to temperature. If temperature compensation is not used, its temperature error is large.

Basic introduction of piezoresistive pressure sensor;

There are two kinds of piezoresistive sensors: one is to use the bulk resistance of semiconductor material to make adhesive strain gauge, which is called semiconductor strain gauge, and the other is to use integrated circuit technology to make diffusion resistance on semiconductor material substrate, which is called diffusion piezoresistive sensor.

Semiconductor strain sensor The structure of semiconductor strain sensor is basically the same as that of resistance strain gage sensor, and it is also composed of three parts, such as elastic sensitive elements. The difference is that the sensitive gate of the strain gauge is made of semiconductor material. Compared with metal strain gauges, semiconductor strain gauges have the most outstanding advantages of small volume and high sensitivity. Its sensitivity coefficient is dozens or even hundreds times larger than the latter, and the output signal can sometimes be measured and recorded directly without amplification.